>> P.258
ApplicationsOpticalInspectionwithWideFieldofViewWhiteLightInterferenceAnalysisWIDEVMU-HRWLI-U+interferenceobjectivelens*Systemexamplewithfixedstand/stageLineupsupportingvariousobservationmethods,includingbright-field,dark-field,polarizing,differentialinterference,nearinfrared,highresolution,etc.Inspectionprocesscanbestreamlinedwithwidefieldofviewmodel.Compactdesignrealizesnon-contacthigh-accuracyfinesurfaceshapeanalysisthroughwhitelightinterference.⇒3DshapemeasurementLaserFineMachiningIRAnalysis/InspectionFlakingofpolyimidemembraneUVlaserapplicationusingVMU-L4B(Sourceofphotographs:V-TechnologyCo.,Ltd.)ColorfilterworkingObjectivescompatiblewithYAGlasers(1064nm,532nm,355nmand266nm)allowhighprecisionandqualityworking.>Removalofprotectivefilms/organicfilms,etc>CuttingofICwiring(Au,Al)andexposureoflowerlayerpattern>FinephotomaskandFPDrepair,etcInfraredanalysisinspectionispossibleincombinationwithamicroscopeunitsupportingNIRseriesobjectivelenses.>Transmissionanalysisofsiliconmaterials>Non-destructiveevaluationofMEMSinteriors>Internalobservationofsemiconductorpackages(IC)/waferjunctionvoidevaluation>Infraredspectralcharacteristicsanalysis,etcWIDEVMU-HR+NIRobjective7-1
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